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As Lithorium MicroTech, our primary field of activity is to produce lithography systems and specific characterization systems used in the production of semiconductor systems. 

We provide services in the field of microfabrication together with our own developed systems and solution partners in the field of microfabrication.


In addition to these, we are with you in the production processes with our experienced team and consultants in semiconductor device sensor and diode production.   

  • Photomask design and manufacture 

  • Lithography processes on wafer substrate 

  • Sample surface coating with spin coater 

  • Mold production by lithography for microfluidic structures


Our services will be diversified with our R&D studies in the field of microfabrication in the near future.

Get information for different systems and methods.

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