Lithorium MicroTech

Engineering in Türkiye for microtechnology.

Precision, sustainable, and application-specific systems are developed for scientific research and advanced manufacturing facilities.

Company profile

From concept to an operational system.

Mask aligners, spin coaters, test and characterization systems, and application-specific engineering solutions are developed for photolithography and microfabrication. Mechanical, electronic, optical, control, and embedded-software disciplines are addressed as an integrated whole.

Lithorium MicroTech LIMA-06 mask aligner system

History

R&D-driven development.

2017

Lithorium MicroTech was founded with the goal of developing advanced research and production equipment at accessible costs.

2018

R&D, product development, and engineering activities began at the Ankara Technopark Technology Development Zone.

5 Projects

Five R&D projects supported by TÜBİTAK TEYDEB were successfully completed, and the resulting systems were delivered for use by universities, research centers, and industrial organizations.

Mission & Vision

Accessible advanced technology.

To provide a reliable, high-quality, and sustainable alternative for critical equipment used in microtechnology and semiconductor technologies, supported by close and responsive engineering assistance.