DESIGNED & ENGINEERED IN TÜRKİYEApplication-Specific Design
Systems configured around your samples, processes, and targets.
Photolithography · Spin coating · Custom systems
From R&D to production, and from production to test and characterization.
Alongside LIMA mask aligners and LSPIN spin coaters, its established standard product families, Lithorium MicroTech develops and delivers application-specific solutions for test, characterization, and production requirements.
Product families
Systems developed for precision processes.
LIMA-04
4-inch photolithography platform
LIMA-06
6-inch photolithography platform
LSPIN-04
100 mm benchtop coating system
LSPIN-06
150 mm benchtop coating system
Automatic Dispenser
Two-channel independent liquid dispensing system
Custom Positioning Systems
Motion and integration requirements beyond standard products
Test and Characterization
Application-specific measurement systems
Product groups
Explore by requirement.
New products are added within the relevant technology family.
Why Lithorium?
The confidence of proven platforms with the flexibility of custom engineering.
No two processes begin with identical requirements. LIMA and LSPIN platforms are developed for stable, repeatable operation, while the system architecture is adapted when sample, measurement, or automation requirements extend beyond standard configurations. This provides a dependable technical foundation for transferring laboratory-developed processes into production.
From R&D to Production
From benchtop platforms to fully automated production solutions.
Rapid Development
Shorter project cycles through prototyping and early validation.
Engineering Support
Configuration, installation, training, and process support.