Product portfolio
From R&D to production, and from production to test and characterization.
Standard product families and application-specific systems are presented with technical information, model options, and related documents.

LIMA
Photolithography Systems
4- and 6-inch semi-automatic mask aligner platforms.

LSPIN
Spin Coater Systems
Programmable precision thin-film coating systems.

DISPENSER
Automatic Liquid Dispensing
Dual-channel independent dispenser designed for integration with the LSPIN family.

TEST
Characterization and Testing
Application-specific measurement, automation, and batch-test systems.

MOTION
Custom Optomechanical Systems
Non-standard stages, modules, and precision positioning solutions.