LSPIN Gen2

Repeatable thin-film coating.

A family of programmable spin coaters with precise speed control for photoresists, polymers, sol-gels, and similar materials.

LSPIN product family

Two working areas, one control architecture.

Both models provide servo-controlled rotation, 20 stored recipes, 10 steps per recipe, and a washable coating chamber.

LSPIN-04 spin coater

Compact platform

LSPIN-04

Benchtop spin coating system for piece samples and substrates up to 100 mm.

Standard chuckØ10–100 mm
Speed range200–12,000 rpm
LSPIN-06 spin coater

Large platform

LSPIN-06

Extended benchtop spin coating system for piece samples and substrates up to 150 mm.

Standard chuckØ10–150 mm
Speed range200–12,000 rpm
Thickness-distribution maps of two coatings produced with an LSPIN spin coater